Resonant Sensors谐振式传感器 PDF下载

Chapter 1 Fundamental Theory of Resonant Sensors
 ； 1. Introduction
 ； 1.2 Resonance Phenomenon
 ； 1.3 Basic Structure of the Resonator Sensors
 ； 1.4 Sensitive Mechanism of the Resonator Sensors
 ； 1.5 The Closed-Ioop System of the Resonator Sensors
 ； 1.5.1 Time-domain Analysis
 ； 1.5.2 Complex Frequency Domain Analysis
 ； 1.6 Mechanical Quality Factor of the Resonant Sensitive Elements
 ； 1.6.1 Definition and Calculation
 ； 1.6.2 The Analysis of the Affecting Factors of Sensors
 ； 1.6.3 Methods on Improving the Mechanical Quality Factor
 ； 1.7 Methods of Measurement of the Frequency Output Resonator Sensors
 ； 1.7.1 Frequency Method
 ； 1.7.2 Periodic Method
 ； 1.8 The Design Features of the Resonator Sensors
 ； 1.9 The Characteristics and Advantages of the Resonator Sensors
 ； Questions and Exercises
Chapter 2 Resonant Pressure Sensor
 ； 2.1 Vibrating String Type Pressure Sensor
 ； 2.1.1 Structure and Principle
 ； 2.1.2 Characteristic Equation
 ； 2.1.3 Excitation Mode
 ； 2.2 Resonant Diaphragm Pressure Sensor
 ； 2.2.1 Structure and Principle
 ； 2.2.2 Characteristic Equation
 ； 2.3 Electromagic Excitation Vibrating Cylinder Pressure Sensor
 ； 2.3.1 Structure and Principle
 ； 2.3.2 Characteristic Equation
 ； 2.3.3 Excitation Mode
 ； 2.3.4 Characteristics Linearization and Error Compensation
 ； 2.4 Piezoelectric Exciting Resonant Cylinder Pressure Sensor
 ； 2.4.1 Structure and Principle
 ； 2.4.2 Characteristics of Piezoelectric Excitation
 ； 2.4.3 Transformation of Picking-up Signals
 ； 2.4.4 The Realization of a Stable Single Modal Self-exciting System
 ； 2.4.5 Related Problems about Double Modal
 ； 2.5 Quartz Vibration Beam Pressure Sensor
 ； 2.5.1 Structure and Principle
 ； 2.5.2 Characteristic Function
 ； 2.6 Micromechanical Silicon Resonant Pressure Sensor
 ； 2.6.1 Sensing Structure and Mathematical Model
 ； 2.6.2 The Process of Signal Transformation
 ； 2.6.3 The Temperature Field Model and Thermal Characteristic Analysis of the Beam Resonator
 ； 2.7 Micro Mechanical Silicon Resonant Pressure Sensor with Differential Output
 ； 2.7.1 Sensing Structure and Working Mechanism
 ； 2.7.2 Characteristic Equation Questions and Exercises
Chapter 3 Resonant Inertial Sensor
 ； 3. Introduction
 ； 3.2 Quartz Vibrating Beam Acceleration Sensor
 ； 3.3 Resonant Silicon Micromachined Acceleration Sensor
 ； 3.4 Piezoelectric Excitation Resonant Cylindrical Shell Angular Rate Sensor
 ； 3.5 Static Exciting Hemispherical Resonant Angular Velocity Sensor
 ； 3.6 Micro Silicon Resonant Angular Velocity Sensor
 ； 3.6.1 Silicon Capacitive Surface Micromechanical Gyroscope
 ； 3.6.2 Silicon Micromechanical Gyroscope with Direct Frequency Output Questions and Exercises
Chapter 4 Resonant Mass Flow Sensor
 ； 4.1 Introduction
 ； 4.2 The Basic Working Principle
 ； 4.3 Mathematical Model of the Measurement
 ； 4.3.1 The Measurement of Mass Flow
 ； 4.3.2 Density Measurement
 ； 4.3.3 The Measurement of the Two-component Fluid
 ； 4.4 Signal Detection Scheme and Its Realization
 ； 4.4.1 Phase Difference Detection of the Mass Flow
 ； 4.4.2 The Amplitude Ratio Detection of the Mass Flow
 ； 4.4.3 Density Detection
 ； 4.5 The Implementations of Coriolis Mass Flow Sensor
 ； 4.6 The Classification of Coriolis Mass Flow Sensor
 ； 4.6.1 The Classification According to the Shape of the Measuring Tube
 ； 4.6.2 Classified According to the Number of Segments of the Measuring Tube
 ； 4, 6.3 Classified According to the Connection of the Measuring Tube with
 ； the Double Tube Mode
 ； 4.6.4 Classified According to the Layout of the Flowing Direction of
 ； the Measuring Tube
 ； 4, 7 Main Application Fields and its Characteristics
 ； 4.7.1 Application Overview
 ； 4.7.2 Advantages
 ； 4.7.3 Disadvantages
 ； 4.8 Interference Factors and Their Restraining
 ； 4.8.1 Pressure Loss
 ； 4.8.2 Measuring the Flow of Gas
 ； 4.8.3 Liquid Containing Gas
 ； 4.8.4 Liquid Containing Solid
 ； 4.8.5 The Influence of the Parameters of Fluid Conditions or Physical
 ； Properties to the Fluid Measurement
 ； 4.8.6 The Interference of Nonlinear Vibration and Working Frequency
 ； Questions and Exercises
Chapter 5 Surface Acoustic Wave Resonant Sensor
 ； 5.1 Introduction
 ； 5.2 SAW Interdigital Transducer
 ； 5.2.1 Basic Characteristics of IDT
 ； 5.2.2 Basic Analyzing Model of IDT
 ； 5.3 SAW Resonator
 ； 5.3.1 Structure and Working Principle
 ； 5.3.2 Stability of Frequency and Temperature
 ； 5.4 Typical SAW Sensor
 ； 5.4.1 SAW Strain Sensor
 ； 5.4.2 SAW Pressure Sensor
 ； 5.4.3 SAW Acceleration Sensor
 ； 5.4.4 SAW Gas Sensor
 ； 5.4.5 SAW Flow Sensor
 ； Questions and Exercises
Appendix A Dynamic Characteristics Analysis of Vibrating Cylinder Pressure
 ； Transducers (VCPT)
Appendix B Mathieu Equation with Application to Analysis of Dynamic Characteristics
 ； of Resonant Inertial Sensors
Appendix C Vibration Membrane Liquid Density Sensor
Appendix D Finite-element Modelling and Simulation on Frequency Characteristics of
  the Silicon Beam Resonator Attached to an E-type Round Diaphragm
  for Measuring the Concentrated Force
Appendix E Nonlinear Vibration Characteristics of Coriolis Mass Flowmeter
Appendix F Modeling of Coriolis Mass Flow Meter of a General Plane-shape Pipe
Appendix G Frequency Measurement Study of Resonant Vibratory Gyroscopes
Appendix H An Electrothermally Excited Dual Beams Silicon Resonant Pressure Sensor
  with Temperature Compensation
Appendix I Non-linear Dynamics of an Electrothermally Excited Resonant Pressure Sensor
Appendix J Design and FEM Simulation Study of the Electro-thermal Excitation
  Resonant Beam with Slit-structure
References